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Vacuum Coater VFR-200M/ERH
DEPOX series / Oil diffusion pump(air cooling) + Oil rotary vacuum pump



 
Outline

Small-sized vacuum evaporation equipment with resistance heating requiring compact storage, such as main pumps, backing pumps, Pirani vacuum gauges, ionization vacuum gauges, valve piping, and electrical systems in stands. Four different types of exhaust system components are provided in the DEPOX series. Ideal for experiments, such as basic research and development requiring easy handling.
 
Features

1. Easy viewable through glass belljar and easy maintenance.

2.

The vacuum chamber can be opened without stopping the main pump.
3. Since an evaporation power supply and electrode have been added, simultaneous evaporation and multi-layer evaporation (a maximum of four layers) are possible.
4. It is easily moving vacuum pumping system with casters.
5. The safety of the installation can be secured with adjusters.

Specification
Model
VFR-200M/ERH
Vacuum performance
Ultimate pressure
8.0 × 10-4Pa
6.0 × 10-4Pa (with LN cold trap)
Evacuation time
4.0 × 10-3Pa/15min
3.0 × 10-3Pa/15min (with LN cold trap)
Vacuum chamber
Belljar size
Glass belljar (dia.300mm × 300mm(H))
Feedthrough collar
12 ports (side 8 / bottom 4)
Recommended substrate size (Maximum substrate size) *1
sq.50mm (sq.140mm)
Power supply system
Evaporation electrode structure
1 point
Evaporation Electrode /
power supply
SEREM “PSE-150C” 1 set
0 - 10V 150A (Max)
Exhaust system
Main pump
Oil diffusion pump (Air cooling) 200L/sec
Liquid Nitrogen trap
Equipped
Backing pump
Oil rotary pump 100 L/min
Oil mist trap
In-line Trap OMI-100
Operation system
Main valve
Butterfly valve
Sub valve
Three way valve
Automatic leak valve
Option
Control
Manual control
Control system
Pirani vacuum gauge
GP-1G
Ionization vacuum gauge
GI-M2
Setup
Overall dimensions (Body)
730mm(W) × 603mm(D) × 1161mm(H)
(Power supply)
480mm(W) × 435.3mm(D) × 149mm(H)
Weight (Body)
145kg
(Power supply)
40kg
*1: The values of the maximum board size are shown when film thickness distributions are not taken into account.

Utility
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Model
VFR-200M/ERH
Power required
(Body)
Single phase, 50/60Hz 100V, 1.4kVA
(Power supply)
Single phase, 50/60Hz, 200V, 1.5kVA
Ground terminal D grade (ground resistance/100Ω or less)
Connection
(Body)
Single phase, 100V
Cabtyre cable (with R3.5-4 ring tongue terminals) 4m
(Power supply)
Single phase, 200V
Cabtyre cable (with R2.0-5 ring tongue terminals) 2m

Outline Drawing

VFR-200M/ERH


Evaporation Electrode SEREM

Feedthrough Collar
Basic composition


* We customize according to the purpose of research and development.

Option
* You can see each option, if you click an option.


Contact
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ULVAC KIKO, Inc.
Overseas Division
TEL (81) 45-533-0206
FAX (81) 45-533-0204
Please contact us by E-mail here

Copyright (C) 2003 ULVAC KIKO, Inc. All Right Reserved. Ver.4.00 (December 2011)
· The dimensions and specifications of the products listed in this site are subject to change without prior notice for improvement of their performance.