Rocking Piston Type Dry Vacuum Pumps DOP-420SA
Three-stage / Actual pumping speed / terminal only (without cord) / with thermal protector


Rocking piston type vacuum pump creates vacuum by reciprocal motion of cup packing inside the cylinder. Bigger volume of pumping speed with increased number of pump heads.


Vacuum chuck, vacuum tweezers.
Semiconductor industry. (Handler,Mountor)
FPD industry. (Bonder)
Printing machine.
Injection molding.
Adsorption and transfer.

  Unit 50Hz 60Hz
Actual Pumping Speed L/min 420 460
Ultimate pressure Pa 17.3 × 103
Motor   Three phase, 200V, 550W, 4P
Full load current A 3.5 3.1
Weight kg 33.0
Inlet, outlet pipe diameter mm O.D. dia.26 × I.D. dia.20 (Rc 3/4)
Ambient temperature °C 0 – 40
Overall dimensions mm 310(W) × 523(L) × 253(H)

1. The pump is stopped when the lord is operated, and the pump can’t be operated just after that.
In this case, please return the atmospheric pressure the inside of the pump.
2. The pump will not often operate normally if it is used with corrosive gases, organic solvents, liquids, or condensed gases (eg steam).
The pump will not often operate normally if it is used with gases containing particles or dust etc.
3. Cup packing that is the sliding material of the pump will be worn out by operating, and microscopic particles result from wear of component.
Moreover, wear is promoted because the sliding material is weak in moisture, and the pump life decreases if the vacuum gas is moisture.
Please suck neither moisture nor condensed gas (steam etc.).
4. It is a pump only in the room.
Please do not set it up in the place, that rain and water splash, and outdoors.

Outline Drawing

Pumping Speed Curves

Optional Voltage
Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked
Three phase, 200V Standard

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Copyright (C) 2003 ULVAC KIKO, Inc. All Right Reserved. Ver.4.00 (December 2011)
· The dimensions and specifications of the products listed in this site are subject to change without prior notice for improvement of their performance.