Scroll Type Dry Vacuum Pump DIS-90
Double wrap / terminal only (without cord) with switch / with thermal protector / with air flash


Double wrap type scroll pump which consists of 1 orbiting and 2 fixed scrolls.
Operation from atmospheric pressure is possible.
High ultimate pressure level is attainable.
Low vibration and noise.
Maintenance cycle can be controlled by hour meter.


Analytical equipment.
Gas recovery system.
Coating equipment.
Back pump for TMP.
Helium leak detector.
Manufacturing process for semiconductor.

  Unit 50Hz 60Hz
Nominal pumping speed L/min 90 108
Ultimate pressure Pa 5.0
Motor   Single phase, 100/115/200/230V,
150W, 4P, Capacitor start & run
Full load current A 2.6/1.3/1.6
Weight kg 14.0
Inlet, outlet pipe diameter   Inlet pipe KF25 Outlet pipe KF16
Ambient temperature °C 5 – 40
Water vapor handling g/day ≤5 (A.F. open)
Overall dimensions mm 214(W) × 308(L) × 225(H)
A.F. = Air flash

1. If the pump evacuates the powder or the product, it might be damaged.
Please use the inlet filter etc.
2. Do not evacuate gas which is hazardous to humans or explosive, flammable, or corrosive.
If done, it can cause failure by gas, explosion or ignite.

Outline Drawing

Pumping Speed Curves

Optional Voltage
Voltage Applicable Volt CE Marked cTUV Marked
Single phase,
100V / 115V (60Hz)/ 200-230V

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Copyright (C) 2003 ULVAC KIKO, Inc. All Right Reserved. Ver.4.00 (December 2011)
· The dimensions and specifications of the products listed in this site are subject to change without prior notice for improvement of their performance.