Diaphragm Type Dry Vacuum Pumps DA-30D
Standard type / Two-stages / with power cord / with switch / with thermal protector


Diaphragm type pump creates vacuum by reciprocate movement of rubber diaphragms.
Pump structure makes Oil-free environment and maintenance easy.
Various pumping speed and two/single stages are selectable depends on your required pressure and pumping volume.


Vacuum chucks, wafer and tip handling devices.
Vacuum tweezers, medical appliances.
Printing equipment.
Automatic packing machines.
Optical appliances.
Semiconductor industry.
Injection molding machine.

  Unit 50Hz 60Hz
Actual Pumping Speed L/min 30 36
Ultimate pressure Pa 6.7 × 103
Motor   Single phase, 100V, 200W, 4P, Split phase starting
Full load current A 5.6 5.0
Weight kg 11.0
Inlet, outlet pipe diameter mm O.D. dia.9 × I.D. dia.5 (Rc 1/4)
Ambient temperature °C 7 – 40
Overall dimensions mm 212(W) × 278(L) × 224.5(H)

1. The pump is stopped when the lord is operated, and the pump can’t be operated just after that.
In this case, please return the atmospheric pressure the inside of the pump.
2. Please don’t suck a causticity gas, an organic solvent, liquid and condensed gas (steam etc.).
Moreover, garbage, dust and etc. must not enter in the pump.
3. A large current flows when the pump starts.
If ON/OFF of the pump power supply will be frequently done in a short time, trouble might be caused. Please do not turn a frequent power supply on and off in a short time.

Outline Drawing

Pumping Speed Curves

Optional Voltage
Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked
Single phase, 100V Standard
Single phase, 115V
Single phase, 200V
Single phase, 220V

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Copyright (C) 2003 ULVAC KIKO, Inc. All Right Reserved. Ver.4.00 (December 2011)
· The dimensions and specifications of the products listed in this site are subject to change without prior notice for improvement of their performance.