Optional parts for High Speed Vacuum Coater (VPC-1100)

Special components

Special components

Name
Applications
Evaporation Electrode SEREM “PSE-150C”
Evaporation Electrode. (with an external aut0matic control function)
Control can be done by the combination of the deposition controller and temperature controller according to specifications.
Deposition Controller
Quartz Crystal Deposition Controller.
Monitors the film thickness during evaporation and provides feedback to the evaporation power supply so that the required film thickness and deposition (evaporation) speeds can be kept constant.
Film thickness sensor
(with dia.30 introduction terminal)
Film thickness sensor by crystal oscillator.
Evaporation at 100 degrees C or less.
Ionization Vacuum Gauge
For pressure measurement from ultrahigh vacuum range to medium vacuum range.
Pirani Vacuum Gauge*
For pressure measurement of a low vacuum range.
* It preinstalls in VPC-1100.

Evaporation Electrode SEREM
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PSE-150C


Power required
Single phase, 50/60Hz, 200V, 1.5kVA, range of allowable voltage = ±10%
Load current
Max. 150A
Control signal
External automatic control input DC 0–10V/ 0–100% setting inbound impeda 1MΩ
Control method
Thyristor AC phase control method
(Precision of output stability : ±10%, Power variation : ±2%)
Rating
30 min
Overall dimension
480mm(W) × 360mm(D) × 149mm(H)
(Without projection parts and accessories)
Weight
40kg

Specification code PSE-15C21111 PSE-15C31111* PSE-15C12211 PSE-15C22211 PSE-15C32211
Switching function of output position
Two-point switching Three-point switching Single-point switching Two-point switching Three-point switching
Switching function of low electric tap
Option Option Loading Loading Loading
Automatic control by deposition controller
Option Option Loading Loading Loading
Automatic control by temperature indicator controller
Option Option Option Option Option
Output remote control
Option Option Option Option Option
* It preinstalls in VPC-1100.

Option
Output position
:
Possible to select by electrode composition of evaporation source.
Low electric tap
:
Effective for small output adjustments of organic matter, etc.
Deposition automatic control
:
Supports automatic output control using the deposition controller.
Temperature automatic control
:
Supports automatic output control using the temperature controller.
Output remote control
:
Effective for an output adjustment while monitoring the interior of the vacuum chamber.

Deposition Controller
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CRTM-6000G

CRTM-9000G
  CRTM-6000G CRTM-9000G
Film thickness / rate resolution
0.04Å
(5MHz New Crystal)
0.00550Å
(5MHz New Crystal)
0.03Å
(6MHz New Crystal)
0.00381Å
(6MHz New Crystal)
Film thickness display range
0.001–999.9 kÅ 0.001–999.9 kÅ
Film thickness display resolution
1 Å 1 Å
Deposition rate display range
0.1– 999.9Å/s 0.001–999.9Å/s
Number of sensors that can be attached
1 2
(Max. 8 with options)
Weight
3.2 kg 8 kg
Utility
AC 85–230V, 200VA AC 100V±10%, 2A
Function
Film thickness control
Function
Deposition rate control
Time power control
Multi-Layer deposition control
Simultaneous deposition control for sources

(with options)
Extremely low rate deposition control
Tooling Z-Ratio Calculation function
Multiple Layer Calculation function
Saving program

Film thickness sensor
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CRTS-4
Baking temperature
150 degrees C (Max)
Maximum sensor head dimensions
dia.31 × 19
Length from flange to head
100–800mm
Cooling water tube diameter
4mm
Cooling water capacity
200cc/min
Cooling water tube connection
Synflex tube, 1/4inch joint
Standard accessories
Oscillator, cables, crystal 5pcs

Ionization Vacuum Gauge
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GI-M2
Measured pressure range
5.00 × 10-89.99 × 10° Pa
Measuring accuracy
±15%
Pressure indication
Digital indication
Line power
AC100V±10%, 50/60Hz, 52VA
Weight
5.3 kg
Overall dimension
240mm(W) × 380mm(D) × 99mm(H)

Pirani Vacuum Gauge
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GP-1G
Measured pressure range
0.4–2700 Pa
Measuring accuracy
±3% of full scale (linear scale conversion)
Pressure indication
Analog indication
Line power
AC100–240V, 50/60Hz, 10VA
Weight
1 kg
Overall dimension
100mm(W) × 130mm(D) × 100mm(H)
GP-1000G
Measured pressure range
0.4–2700 Pa
Measuring accuracy
±15%, 51–760Pa
±30%, 10–1000Pa (exclude 51–760Pa)
±50%, 0.4–2700Pa (exclude 10–1000Pa)
Pressure indication
Digital indication
Line power
AC100–240V, 50/60Hz, 10VA
Weight
1 kg
Overall dimension
50mm(W) × 238mm(D) × 99mm(H)
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Equipment external system
Equipment external system

Name
Applications
Bell jar cover*
Handles for Glass bell jar / Splash prevention for glass.
Glass bell jar cover
Glass containers for thin film preparation.
Metal bell jar (with water cooling tube)
Overheating prevention for the interior of bell jars. (an elevating device is required separately)
Elevating device*
For bell jar elevation. (a bell jar cover is required changes)
Side panel
For safety regulation.
Back panel
For safety regulation.
System rack
Simple storage for Ionization Vacuum Gauge and Deposition controller.
Control rack
Storage for control equipment.
Side panel for control rack
For safety regulation.
Back panel for control rack
For safety regulation.
*
It preinstalls in VPC-1100.
Since the elevating device is designed for glass bell jars, specifications are required to be changed if a metal bell jar is selected.

System rack / Side panel
System rack : Simple storage for measurement hardware.
(*Measurement hardware is option.)
Side panel : For safe regulation management of the main part of system.

Metal bell jar
(with water cooling tube)
For overheating prevention of bell jar
Control rack
Storage for control equipment (*Equipments and panels are optional parts)

Accessories for inner vacuum chamber
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Accessories for inner vacuum chamber

Name
Applications
Sample holder
Fixation of a sample
Adhesion shield plate
Prevention from thin film adhesion to a bell jar cover inside
Electrode partition
Partition of deposition sources / Prevention of contamination
Substrate heating device / SH-350F
Heating for substrate (sample) / Maximum preset temperature is 350 degrees C
Substrate heating device / SH-650F
Heating for substrate (sample) / Maximum preset temperature is 650 degrees C (Metal bell jar is necessary.)
Basic electrode set (for service port)
Electrode for service port introduction
Basic electrode set (for base plate)
Electrode for base plate introduction
Gauge port set
For dia. 18 gauge port addition
Hermetic seal port set
For hermetic port addition
8P hermetic
Terminals for turning on electricity
8P hermetic sockets
Terminal sockets for turning on electricity
Sealing flange set (for service port)
Sealing plug for service port
Sealing flange set (for base plate)
Sealing plug for base plate
UFC070 Adapter
For 070 conflate flange attachment
KF-25 Adapter
For KF-25 flange attachment
Sample holder
Fixation of a sample
Gas introduction port
For gas introduction in vacuum chamber
Carbon electrode set
For making of carbon thin film
Other things
Customizable to meet your needs. Please contact us.

Sample holder
Holder A
Holder B
Holder C
Holder-soft A
(50-square producing software)
 
Holder-soft B
(M4 screw-tap hole soft)
These are holders for attaching substrate (glass, silicon wafer and etc.) to make it deposit a thin film.

Adhesion shield plate
Prevention from thin film adhesion to a bell jar cover inside
Electrode partition
For prevention of contamination
UFC070 Adapter
For 070 conflate flange attachment

Hermetic seal port set
It is a seal port which introduces electric wires, such as various sensors and measurement, in a vacuum chamber
Gauge port set
It is a set for gauge port addition introduction.
Sealing flange set
It is s sealing plug of the port which is not used.

Substrate heating device (SH-1350F)
It is a set including a heating stand for heating a substrate, and a measurement apparatus.

Gas introduction port
For gas introduction in vacuum chamber.
 
Carbon electrode
For making of carbon thin film
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Electrode structure options
Electrode structure options

Name
Applications
Evaporated electrode with 3 points
For single-point + two-point switching evaporation (two points simultaneously)/single layer film or composite membrane and thick film preparations.
Evaporated electrode with 4 points
For two-point switching + two-point switching evaporation (two points simultaneously) / single layer film or composite membrane and thick film preparations.
Evaporated electrode with 5 points
For two-point switching + three-point switching evaporation (two points simultaneously) / single layer film or composite membrane and thick film preparations.
EB deposition of 1 point type
1 point type of deposition for refractory material. (Metal bell jar is necessary)
EB deposition of 4 switching points
4 switching points type of deposition for refractory material. (Metal bell jar is necessary)
EB deposition of 1 point type + resistance heating of 1 point type*
1 point type of deposition for refractory material + 1 point type of deposition with resistance heating. (Metal bell jar is necessary)
EB deposition of 1 point type + resistance heating of 2 points type*
1 point type of deposition for refractory material + 2 switching points type of deposition with resistance heating. (Metal bell jar is necessary)
EB deposition of 4 switching points + resistance heating of 1 point type*
4 switching points type of deposition for refractory material + 1 point type of deposition with resistance heating. (Metal bell jar is necessary)
EB deposition of 1 point type + resistance heating of 2 points type*
4 switching points type of deposition for refractory material + 2 switching points type of deposition with resistance heating. (Metal bell jar is necessary)
* The evaporation source position for resistance heating types is offset from the vacuum-chamber center.

VPC-1100 2 points + 2 points
VPC-1100 2 points + 3 points
VPC-1100 the example corresponding to equipment
EB 4 points + resistance 2 points
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Pumping system
Pumping system

Name
Applications
Automatic leak valve for Oil rotary vacuum pump
For venting when a backing pump stops. (For the main pump protection from power outage)
Liquid Nitrogen trap
For adsorption of condensation gas and back flow oil.
Oil-mist trap
For the oil mist escape prevention from an oil rotary vacuum pump exhaust port.
In-line trap
For the oil mist escape prevention from an oil rotary vacuum pump exhaust port and piping connection to exhaust pipe.

Oil-mist trap
For the oil mist escape prevention from an oil rotary vacuum pump exhaust port and return it to the pumps oil reservoir.
In-line trap
For the oil mist escape prevention from an oil rotary vacuum pump exhaust port and piping connection to exhaust pipe.

*
Customizable to meet your needs. Please contact us.


Contact
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ULVAC KIKO, Inc.
Overseas Division
TEL (81) 45-533-0206
FAX (81) 45-533-0204
Please contact us by E-mail here


Copyright (C) 2003 ULVAC KIKO, Inc. All Right Reserved. Ver.4.00 (December 2011)
· The dimensions and specifications of the products listed in this site are subject to change without prior notice for improvement of their performance.