Optional parts for Vacuum Coater (VPC-260F)

Special components

Special components

Name
Applications
Evaporation Electrode SEREM “PSE-150C” Evaporation Electrode. (with an external automatic control function)
Control can be done by the combination of the deposition controller and temperature controller according to specifications.
Deposition Controller Quartz Crystal Deposition Controller.
Monitors the film thickness during evaporation and provides feedback to the evaporation power supply so that the required film thickness and deposition (evaporation) speeds can be kept constant.
Film thickness sensor
(with dia.30 introduction terminal)
Film thickness sensor by crystal oscillator.
Evaporation at 100 degrees C or less.
Ionization Vacuum Gauge For pressure measurement from ultrahigh vacuum range to medium vacuum range.
Pirani Vacuum Gauge* For pressure measurement of a low vacuum range.

Evaporation Electrode SEREM top of pages

PSE-150C


Power required Single phase, 50/60Hz, 200V, 1.5kVA, range of allowable voltage = ±10%
Load current Max. 150A
Control signal External automatic control input DC 0– 10V/ 0–100% setting inbound impeda 1MΩ
Control method Thyristor AC phase control method
(Precision of output stability : ±10%, Power variation : ±2%)
Rating 30 min
Overall dimension 480mm(W)×360mm(D)×149mm(H)
(Without projection parts and accessories)
Weight 40kg

Specification code PSE-15C21111 PSE-15C31111 PSE-15C12211 PSE-15C22211 PSE-15C32211
Switching function of output position Two-point switching Three-point switching Single-point switching Two-point switching Three-point switching
Switching function of low electric tap Option Option Loading Loading Loading
Automatic control by deposition controller Option Option Loading Loading Loading
Automatic control by temperature indicator controller Option Option Option Option Option
Output remote control Option Option Option Option Option

Option
Output position : Possible to select by electrode composition of evaporation source.
Low electric tap : Effective for small output adjustments of organic matter, etc.
Deposition automatic control : Supports automatic output control using the deposition controller.
Temperature automatic control : Supports automatic output control using the temperature controller.
Output remote control : Effective for an output adjustment while monitoring the interior of the vacuum chamber.

Deposition Controller top of pages
CRTM-6000G

CRTM-9000G
  CRTM-6000G CRTM-9000G
Film thickness / rate resolution 0.04Å
(5MHz New Crystal)
0.00550Å
(5MHz New Crystal)
0.03Å
(6MHz New Crystal)
0.00381Å
(6MHz New Crystal)
Film thickness display range 0.001–999.9 kÅ 0.001–999.9 kÅ
Film thickness display resolution 1 Å 1 Å
Deposition rate display range 0.1–999.9Å/s 0.001–999.9Å/s
Number of sensors that can be attached 1 2
(Max. 8 with options)
Weight 3.2 kg 8 kg
Utility AC 85–230V, 200VA AC 100V±10%, 2A
Function Film thickness control Function
Deposition rate control
Time power control
Multi-Layer deposition control
Simultaneous deposition control for sources
(with options)
Extremely low rate deposition control
Tooling Z-Ratio Calculation function
Multiple Layer Calculation function
Saving program

Film thickness sensor top of pages
CRTS-4
Baking temperature
150 degrees C (Max)
Maximum sensor head dimensions
dia.31 × 19
Length from flange to head
100–800mm
Cooling water tube diameter
4mm
Cooling water capacity
200cc/min
Cooling water tube connection
Synflex tube, 1/4inch joint
Standard accessories
Oscillator, cables, crystal 5pcs

Ionization Vacuum Gauge top of pages
GI-M2
Measured pressure range 5.00 × 10-89.99 × 10° Pa
Measuring accuracy ±15%
Pressure indication Digital indication
Line power AC100V±10%, 50/60Hz, 52VA
Weight 5.3 kg
Overall dimension 240mm(W) × 380mm(D) × 99mm(H)

Pirani Vacuum Gauge top of pages
GP-1G
Measured pressure range 0.4–2700 Pa
Measuring accuracy ±3% of full scale (linear scale conversion)
Pressure indication Analog indication
Line power AC100–240V, 50/60Hz, 10VA
Weight 1 kg
Overall dimension 100mm(W) × 130mm(D) × 100mm(H)
GP-1000G
Measured pressure range 0.4–2700 Pa
Measuring accuracy ±15% 51–760Pa
±30% 10–1000Pa (exclude 51–760Pa)
±50% 0.4–2700Pa (exclude 10–1000Pa)
Pressure indication Digital indication
Line power AC100–240V, 50/60Hz, 10VA
Weight 1 kg
Overall dimension 50mm(W) × 238mm(D) × 99mm(H)
top of pages

Equipment external system
Equipment external system

Name
Applications
Bell jar cover Handles for Glass bell jar / Splash prevention for glass.
Bell jar holder Handles for Glass bell jar.
Glass bell jar cover Glass containers for thin film preparation.
Metal bell jar (with water cooling tube) Overheating prevention for the interior of a bell jar. (an elevating device is required separately)
Elevating device For bell jar elevation. (a bell jar cover is required separately)
16 ports feedthrough collar (Side 16) Extension for introduction ports.
Control rack Storage for control equipment.
Side panel for control rack For safety regulation.
Back panel for control rack For safety regulation.

Bell jar cover
Protection and handles for glass bell jar
Bell jar holder
Bell jar holder is usefully to attach a bell jar and remove
Metal bell jar
(with water cooling tube)
It is an object for overheating prevention of s bell jar

Elevating device
The workload for bell jar elevating operations is reduced. In addition, there is no worry of damage from dropping; attaching/detaching operations can be performed safely.
Control rack
Storage for control equipment (*Equipments and panels are optional parts)


Accessories for inner vacuum chamber
top of pages
Accessories for inner vacuum chamber

Name
Applications
Sample holder Fixation of a sample.
Adhesion shield plate Prevention from thin film adhesion to a bell jar cover inside.
Electrode partition Partition of deposition sources / Prevention of contamination.
Substrate heating device / SH-350F Heating for substrate (sample) / Maximum preset temperature is 350 degrees C.
Substrate heating device / SH-650F Heating for substrate (sample) / Maximum preset temperature is 650 degrees C. (Metal bell jar is necessary.)
Basic electrode set (for service port) Electrode for service port introduction.
Gauge port set For dia. 18 gauge port addition.
Hermetic seal port set For hermetic port addition.
8P hermetic Terminals for turning on electricity.
8P hermetic sockets Terminal sockets for turning on electricity.
Sealing flange set (for service port) Sealing plug for service port.
UFC070 Adapter For 070 conflate flange attachment.
KF-25 Adapter For KF-25 flange attachment.
Gas introduction port For gas introduction in vacuum chamber.
Carbon electrode set For making of carbon thin film.
Other things Substrate rotation mechanisms can be customized to meet your needs. Please contact us.

Sample holder
Holder B
Holder-soft A
(50-square producing software)

Holder A
Holder C
Holder-soft B
(M4 screw-tap hole soft)

These are holders for attaching substrate (glass, silicon wafer and etc.) to make it deposit a thin film.

Adhesion shield plate
Prevention from thin film adhesion to a bell jar cover inside.
Electrode partition

*
Form changes with electrode structure
For prevention of contamination.

Hermetic seal port set
It is a seal port which introduces electric wires, such as various sensors and measurement, in a vacuum chamber
Gauge port set
It is a set for gauge port addition introduction.
Sealing flange set
It is s sealing plug of the port which is not used.

Substrate heating device (SH-350F)
It is a set including a heating stand for heating a substrate, and a measurement apparatus.

Gus introduction port
For gas introduction in vacuum chamber.
 
Carbon electrode
For making of carbon thin film
top of pages


Electrode structure options
Electrode structure options

Name
Applications
Evaporated electrode with 2 points switch For two-point switching evaporation/single layer film and laminated film preparations.
Evaporated electrode with 2 points simultaneously For two-point simultaneous evaporation/thick film preparations for composite membranes or single layer films.
Evaporated electrode with 3 points switch For three-point switching evaporation/single layer film and laminated film preparations.
Evaporated electrode with 3 points simultaneously For three-point simultaneous evaporation/thick film preparations for composite membranes or single layer films.
Evaporated electrode with 3 points irregularity For single-point + two-point switching evaporation (two points simultaneously) / single layer film or composite membrane and thick film preparations.
Evaporated electrode with 4 points irregularity For two-point switching + two-point switching evaporation (two points simultaneously) / single layer film or composite membrane and thick film preparations.

VPC-260F 2 points
VPC-260F 3 points
VPC-260F 2 points + 2points
top of pages

Pumping system
Pumping system

Name
Applications
Automatic leak valve for Oil rotary vacuum pump For venting when a backing pump stops. (For the main pump protection from power outage)
Liquid Nitrogen trap For adsorption of condensation gas and back flow oil.
Oil-mist trap For the oil mist escape prevention from an oil rotary vacuum pump exhaust port.
In-line trap For the oil mist escape prevention from an oil rotary vacuum pump exhaust port and piping connection to exhaust pipe.

Oil-mist trap
For the oil mist escape prevention from an oil rotary vacuum pump exhaust port and return it to the pumps oil reservoir.
In-line trap
For the oil mist escape prevention from an oil rotary vacuum pump exhaust port and piping connection to exhaust pipe.

* Other services can be customized to meet your needs.


Contact
top of page
ULVAC KIKO, Inc.
Overseas Division
TEL (81) 45-533-0206
FAX (81) 45-533-0204
Please contact us by E-mail here


Copyright (C) 2003 ULVAC KIKO, Inc. All Right Reserved. Ver.4.00 (December 2011)
· The dimensions and specifications of the products listed in this site are subject to change without prior notice for improvement of their performance.