Vacuum Coater VTR-350M/ERH
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DEPOX series / Turbo molecular pump + Oil rotary vacuum pump
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| Outline |
Small-sized vacuum evaporation equipment with resistance heating requiring compact storage, such as main pumps, backing pumps, Pirani vacuum gauges, ionization vacuum gauges, valve piping, and electrical systems in stands. Four different types of exhaust system components are provided in the DEPOX series. Ideal for experiments, such as basic research and development requiring easy handling. |
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| Features |
| 1. |
It is easily moving vacuum pumping system with casters. |
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2. |
The safety of the installation can be secured with adjusters. |
| 3. |
Easy viewable through glass belljar and easy maintenance. |
| 4. |
The vacuum chamber can be opened without stopping the main pump. |
| 5. |
Since an evaporation power supply and electrode have been added, simultaneous evaporation and multi-layer evaporation (a maximum of four layers) are possible. |
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Model |
VTR-350M/ERH |
| Vacuum performance |
Ultimate pressure |
4.0 × 10-4Pa
2.0 × 10-4Pa (with LN cold trap)*1 |
Evacuation time |
4.0 × 10-3Pa/10min
3.0 × 10-3Pa/10min (with LN cold trap)*1 |
| Vacuum chamber |
Belljar size |
Glass belljar (dia.300mm × 300mm(H)) |
Feedthrough collar |
12 ports (side 8 / bottom 4) |
Recommended substrate size (Maximum substrate size) *2 |
sq.50mm (sq.140mm) |
| Power supply system |
Evaporation electrode structure |
1 point |
Evaporation Electrode /
power supply |
SEREM “PSE-150C” 1 set
0 - 10V 150A (Max) |
| Exhaust system |
Main pump |
Turbo molecular pump (345L/sec) |
Liquid Nitrogen trap |
Option |
Backing pump |
Oil rotary pump 200 L/min |
Oil mist trap |
In-line Trap OMI-200 |
| Operation system |
Main valve |
Butterfly valve |
Sub valve |
Three way valve |
Automatic leak valve |
Option |
Control |
Manual control |
| Control system |
Pirani vacuum gauge |
GP-1G |
Ionization vacuum gauge |
GI-M2 |
| Setup |
Overall dimensions (Body) |
730mm(W) × 584mm(D) × 1161mm(H) |
(Power supply) |
480mm(W) × 435.3mm(D) × 149mm(H) |
Weight (Body) |
165kg |
(Power supply) |
40kg |
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*1 : A liquid nitrogen trap is optional.
*2 : The values of the maximum board size are shown when film thickness distributions are not taken into account.
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Model |
VTR-350M/ERH |
| Power required |
(Body) |
Single phase, 50/60Hz 100V, 1.4kVA |
(Power supply) |
Single phase, 50/60Hz, 200V, 1.5kVA |
| Ground terminal |
D grade (ground resistance/100Ω or less) |
| Connection |
(Body)
Single phase, 100V |
Cabtyre cable (with R3.5-4 ring tongue terminals) 4m |
(Power supply)
Single phase, 200V |
Cabtyre cable (with R2.0-5 ring tongue terminals) 2m |
 VTR-350M/ERH
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Evaporation Electrode SEREM |
* We customize according to the purpose of research and development.
* You can see each option, if you click an option. |
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ULVAC KIKO, Inc. |
Overseas Division |
TEL (81) 45-533-0206 |
FAX (81) 45-533-0204 |
Please contact us by E-mail → here |
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