Vacuum Coater VPC-260F |
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VPC series / Oil diffusion pump (air cooling) + Oil rotary vacuum pump |
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| Outline |
Small-sized high-vacuum low cost exhaust equipment with resistance heating requiring compact storage, such as main pumps, backing pumps, valve piping, electrical systems and pressure measurement ports in pipe frames. Ideal for experiments, such as basic research and development of small boards. |
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| Features |
| 1. |
Installation in a little space is possible by compact size at a table type. |
2. |
Easy viewable through glass belljar and easy maintenance. |
| 3. |
The vacuum chamber can be opened without stopping the main pump. |
| 4. |
Since an evaporation power supply and electrode have been added, simultaneous evaporation and multi-layer evaporation are possible. |
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Model |
VPC-260F |
| Vacuum performance |
Ultimate pressure |
1.3 × 10-3Pa
6.6 × 10-4Pa (with LN cold trap) |
Evacuation time |
4.0 × 10-3Pa/20min
1.3 × 10-3Pa/20min (with LN cold trap) |
| Vacuum chamber |
Belljar size |
Glass belljar (dia.300mm × 300mm(H)) |
Feedthrough collar |
8 ports (side 8) |
Recommended substrate size (Maximum substrate size) *1 |
sq.50mm (sq.140mm) |
| Power supply system |
Evaporation electrode structure |
1 point |
Evaporation Electrode /
power supply |
SEREM “PSE-150C” 1 set
0 - 10V 150A (Max) |
| Exhaust system |
Main pump |
Oil diffusion pump (Air cooling) 200L/sec |
Liquid Nitrogen trap |
Equipped |
Backing pump |
Oil rotary pump 100 L/min |
Oil mist trap |
Option |
| Operation system |
Main valve |
Clapper valve |
Sub valve |
Three way valve |
Automatic leak valve |
Option |
Control |
Manual control |
| Control system |
Pirani vacuum gauge |
Option |
Ionization vacuum gauge |
Option |
| Setup |
Overall dimensions (Body) |
530mm(W) × 550mm(D) × 1135mm(H) |
(Power supply) |
480mm(W) × 435.3mm(D) × 149mm(H) |
Weight (Body) |
75kg |
(Power supply) |
40kg |
*1: The values of the maximum board size are shown when film thickness distributions are not taken into account.
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Model |
VPC-250F |
| Power required |
(Body) |
Single phase, 50/60Hz, 100V, 1.35kVA |
(Power supply) |
Single phase, 50/60Hz, 200V, 1.5kVA |
| Ground terminal |
D grade (ground resistance / 100Ω or less) |
| Connection |
(Body)
Single phase, 100V |
Cabtyre cable (with plug) 2m |
(Power supply)
Single phase 200V |
Cabtyre cable (with R2.0-5 ring tongue terminals) 2m |
 VPC-260F
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Evaporation Electrode SEREM |
* You can see each option, if you click an option. |
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ULVAC KIKO, Inc. |
Overseas Division |
TEL (81) 45-533-0206 |
FAX (81) 45-533-0204 |
Please contact us by E-mail → here |
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