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High
Vacuum Pumping System VPC-260F
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| Outline |
IT is based on a small-sized high vacuum pumping system of
VPC-250F. Vacuum container, power source for evaporation,
electrode for evaporation and LN cold trap are attached to
VPC=250F for the use as a vacuum coater. By combining optional
parts, the function can be enlarged. |
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| Features |
| abundance of optional parts allows superior
performance. VPC-260 is water cooled and VPC-260F is
air cooled. |
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| Pumping system |
VPC-250F |
| Belljar size |
Dia.
300 X 300H |
| Ultimate pressure |
6.5 X
10-4Pa/ with LN cold trap |
| Evacuation time |
20min.
until 1.3 X 10-3Pa / with LN cold
trap |
| Power supply for
deposition |
0 ~ 10V
/ MAX 150A
Dimensions : 420 (W) X 405 (D) X 215 (H)
weight : 24Kg |
| Power
required |
Main
unit |
Single
phase 100V 1.35kW |
| evaporation
souse |
Dia.200V
1.5kW |
| Deposition
electrodes |
One set
(2 ~ 3option) |
| Water
required |
Air cooled |
| Weight |
75kg |
| Dimensions
W X D X H |
530mm
X 480mm X 1135mm |
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VPC-260
[1] Glass belljar
[2] Base plate (VPC-060), Feethrough collar (VPC-260,VPC-260F) with
electrod, Fillamet holder, suter, and support.
[3] LN cold trap
[4] Oil diffusion pump
[5] Oil-sealed rotary vacuum pumps
[6] Gauge port (18 dia. standerd, 15 dia. option)
[7] 8P hermetic port
[8] Spare port |
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