High Speed Vacuum Coater VPC-1100 |
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VPC series / Oil diffusion pump (Water cooling) + Oil rotary vacuum pump |
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| Outline |
It is a high-speed type vacuum deposition system by the resistance heating formula which stored compactly required apparatus, such as an oil diffusion pump, an oil rotary vacuum pump, Pirani gauge, valve piping, an electric system, and a pressure measurement port, in the mount, and has equipped belljar rise-and-fall equipment etc.
It is ideal for an experiment, such as basic research development of large substrate size. |
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| Features |
| 1. |
It is easily moving vacuum pumping system with casters. |
2. |
The safety of the installation can be secured with adjusters. |
| 3. |
Easy viewable through glass belljar and easy maintenance. |
| 4. |
The vacuum chamber can be opened without stopping the main pump. |
| 5. |
Since an evaporation power supply and electrode have been added, simultaneous evaporation and multi-layer evaporation are possible. |
| 6. |
Deposition of high melting point material is possible when the specifications are changed to EB. |
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Model |
VPC-1100 |
| Vacuum performance |
Ultimate pressure |
4.0 × 10-4Pa
1.3 × 10-4Pa (with LN cold trap) |
Evacuation time |
4.0 × 10-3Pa/10min
10-4Pa/10min (with LN cold trap) |
| Vacuum chamber |
Belljar size |
Glass belljar (dia.390mm × 350mm(H)) |
Feedthrough collar |
20 ports (side 14 / bottom 6) |
Recommended substrate size (Maximum substrate size) *1 |
sq.50mm (sq.220mm) |
| Power supply system |
Evaporation electrode structure |
3 point |
Evaporation Electrode /
power supply |
SEREM “PSE-150C” 1 set
0 - 10V 150A (Max) |
| Exhaust system |
Main pump*2 |
Oil diffusion pump (Water cooling) 1100L/sec |
Liquid Nitrogen trap |
Equipped |
Backing pump |
Oil rotary pump 200 L/min (2 pumps) |
Oil mist trap |
Option |
| Operation system |
Main valve |
Butterfly valve |
Sub valve |
Three way valve |
Automatic leak valve |
Option |
Control |
Manual control |
| Control system |
Pirani vacuum gauge |
GP-1G |
Ionization vacuum gauge |
Option |
| Setup |
Overall dimensions (Body) |
1235mm(W) × 836mm(D) × 2155mm(H) |
(Power supply) |
Equipped |
Weight (Body) |
313kg |
(Power supply) |
Equipped |
*1: The values of the maximum board size are shown when film thickness distributions are not taken into account.
*2: The specifications can be arranged for a turbo-molecular pump (TMP).
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Model |
VPC-1100 |
| Power required |
(Body) |
Three phase, 50/60Hz, 200V, 5.0kVA |
(Body) |
Single phase, 50/60Hz, 100V, 1.0kVA |
| Ground terminal |
D grade (ground resistance/100Ω or less) |
| Connection |
(Body) Three phase, 200V |
Vinyl cabtyre cable (with R3.5–4 ring tongue terminals) 4m |
(Body) Single phase, 100V |
Vinyl cabtyre cable (with plug) 4m |
| Water requirement |
1.5L/min (Water temperature : 20–25 degrees C,
Water pressure : 200kPa (gauge pressure)) |
| Connection (water piping) |
Rp1/4 (With hose fitting "Kantouch") |
| Recommended house* |
Tetoron Braided hose (O.D.dia.15mm×I.D.dia.9mm) |
* Please prepare the cooling water piping
 VPC-1100
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Evaporation Electrode SEREM |
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[1] |
Plate |
[2] |
Filter |
[3] |
Service port (L) |
[4] |
Service port (S) |
[5] |
Gauge port.1 |
[6] |
Hermetic seal port.3 pcs. |
[7] |
Shutter |
[8] |
Electrode COM |
[9] |
Electrode 1 |
[10] |
Electrode 2 |
[11] |
Electrode 3 |
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* We customize according to the purpose of research and development.
* You can see each option, if you click an option. |
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ULVAC KIKO, Inc. |
Overseas Division |
TEL (81) 45-533-0206 |
FAX (81) 45-533-0204 |
Please contact us by E-mail → here |
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