| 1. |
This system is more effective with high
pumping down performance. |
| · |
10 min. to 10-4Pa from atmospheric pressure. |
| · |
LN trap has a large capacity that can hold
trap condition to 10 hours. |
| · |
Cooling water can be cut off only 15 minutes
after system is shut down. |
| 2. |
Extended functions (optional) |
| · |
Multi-layer deposition and co-deposition
are available by assembling additional evaporation power
supply. |
| 3. |
Compact and movable. |
