High
Vacuum Pumping System VFR-200M/X
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DEPOX series / Oil diffusion pump (air cooling) + Oil rotary vacuum pump
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| Outline |
It is the small high vacuum pumping system which stored compactly required apparatus, such as a main pump, backing pump, valve piping, an electric system, and a pressure measurement port, in the mount.
DEPOX series is preparing four types with which the composition of an exhaust system differs.
Handling is easy and ideal for an experiment. |
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| Features |
| 1. |
It is easily moving vacuum pumping system with casters. |
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2. |
The safety of the installation can be secured with adjusters. |
| 3. |
The vacuum chamber can be opened without stopping the main pump. |
| 4. |
Maintenance is easy, because it is made of few parts included a three way valve. |
| 5. |
Improved system scalability by using new rack which can install optional items such as vacuum gauge. |
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Cooling water of an oil diffusion pump is unnecessary because of an air cooling type. |
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| Model |
VFR-200M/X |
| Ultimate
pressure |
10-4Pa
10-5Pa (with LN cold trap) |
| Main pump |
Oil diffusion pump (air cooling) 200L/sec |
| Backing pump |
Oil rotary vacuum pump 100L/min |
| Main valve |
65A Butterfly valve |
| Sub valve |
Three way valve |
| Inlet flange |
VG-65 |
| Weight |
120.7kg |
| Overall dimensions |
730mm(W)×584mm(D)×804mm(H) |
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* Ionization vacuum gauge · Pirani vacuum gauge · LN cold trap · Conversion flange · Oil mist trap are options.
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Model |
VFR-200M/X |
| Power required |
Single phase, 50/60Hz, 100V, 1.4kVA |
| Ground terminal |
D grade (ground resistance/100MΩ or less) |
| Connection |
Vinyl cabtyre cable (with R3.5-4 ring tongue terminals) 4m |
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Model |
DPF-200 |
| Ultimate
pressure |
10-5Pa |
| Maximum evacuation capacity |
200L/sec |
| Critical back-pressure |
20Pa |
| Required power |
Single phase, 50/60Hz, 100V, 0.45kW |
| Recommended oil |
SX 70cc |
| Weight |
5kg |
| Inlet flange |
VG-65 |
| Outlet flange |
KF-25 |
| Cooling method |
air cooling |
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* You can see each option, if you click an option. |
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ULVAC KIKO, Inc. |
Overseas Division |
TEL (81) 45-533-0206 |
FAX (81) 45-533-0204 |
Please contact us by E-mail → here |
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