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High frequency Sputtering System RFS-200
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| Outline |
Small-sized high-frequency sputtering device with an RF power supply. Ideal for basic research and development experiments because of the deposition capabilities for metals, semiconductors and insulators. |
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| Features |
| 1. |
It is sputtering system of an insulator, metal, and a semiconducting material. |
2. |
Oil diffusion pump is used for main pumping. |
| 3. |
Single deposition is available by dia.80 mm, 1 cathode. |
| 4. |
Sputtering speed 20nm/min. (SiO2) is available by conventional sputtering. |
| 5. |
Automatic matching control is available. |
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Model |
RFS-200 |
| Vacuum performance |
Ultimate pressure |
6.6 × 10-4Pa
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Evacuation time |
6.6 × 10-3Pa/5min |
| Vacuum chamber |
Vacuum chamber |
Metal chamber (200mm(W)×250mm(D)×150mm(H)) |
Cathode |
dia.80mm, 1way |
Standard target |
dia.80mm × t1mm |
Effective area of sputtering |
50mm |
Sputtering speed |
SiO2, more than 20nm/min at deposition |
Film thickness distribution |
SiO2, within ±8% at dia.50mm |
Substrate heating temperature |
Max 350 degrees C |
Substrate electrode distance |
30mm – 60mm (Variable) |
| Exhaust system |
Main pump |
Oil diffusion pump (Water cooling) 150L/sec |
Liquid Nitrogen trap |
Option |
Backing pump |
Oil rotary pump 100L/min |
Oil mist trap |
Oil mist trap OMT-100A |
| Operation system |
Main valve |
Clapper valve |
Sub valve |
Three way valve |
Automatic leak valve |
Option |
Control |
Manual control |
| Control system |
RF power supply |
Max 200W (0–200W: variable) |
Pirani vacuum gauge |
G-TRAN |
Ionization vacuum gauge |
Option |
| Setup |
Overall dimensions |
800mm(W) × 725mm(D) × 1635mm(H) |
Weight |
200kg |
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Model |
RFS-200 |
| Power required |
Single phase, 50/60Hz, 100V, 1.3kVA |
| Ground terminal |
A grade (ground resistance/10Ω or less) |
| Water requirement |
5.0L/min (Water temperature : less than 25 degrees C,
Water pressure : 200 – 300kPa (gauge pressure)) |
| Connection (power supply) |
Vinyl cabtyre cable (with plug) 2m |
| Connection (ground) |
Earth cable (sheet copper) 2m |
| Connection (water piping) |
Tetoron Braided hose (O.D.dia.15mm × I.D.dia.9mm) 2m (2 lines) |
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[1]
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System rack |
[2] |
Sample holder |
[3] |
Front door |
[4] |
Target |
[5] |
Viewport |
[6] |
Substrate electrode |
[7] |
Gauge port |
[8] |
Service port |
[9] |
Shutter |
[10] |
Backing plate |
[11] |
Target electrode |
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[The standard type] |
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* |
We customize according to the purpose of research and development. |
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 Liquid Nitrogen trap
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Ionization vacuum gauge |
Magnetron |
In line trap (OMI-100) |
Turbo molecular pump |
DC power supply |
Introduction gas (2,3 lines) |
Automatic leak valve for oil rotary pump |
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ULVAC KIKO, Inc. |
Overseas Division |
TEL (81) 45-533-0206 |
FAX (81) 45-533-0204 |
Please contact us by E-mail → here |
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