ULVAC KIKO.Inc, >Vacuum Pump > Vacuum pump maker

Small Vacuum Systems

1. Mechanical Booster Pumping Systems (VM Series)

Model	Exhaust system		Ultimate Pressure	Features
Model	Main pump	Backing pump	Pa	Features
VMR-050	Mechanical Booster pump (833L/min)	Oil rotary pump (200L/min)	4.0×10^-2	Small-sized high-vacuum exhaust equipment integrating a mechanical booster pump, backing pump and piping into one body. Ideal for experiments requiring easy handling and maintenance.

2. High Vacuum Pumping Systems (VPC Series)

Model	Exhaust system		Ultimate Pressure	Features
Model	Main pump	Backing pump	Pa	Features
VPC-050	Oil diffusion pump (50L/sec)	Oil rotary pump (20L/min)	7.0×10^-4	Small-sized high-vacuum low cost exhaust equipment that must be stored compactly, such as oil diffusion pumps, oil rotary vacuum pumps, valve piping, electrical systems and pressure measurement ports in pipe frames. Ideal for experiments requiring easy handling and maintenance.
VPC-250F	Oil diffusion pump (200L/sec)	Oil rotary pump (100L/min)	10^-4 order

3. High Vacuum Pumping Systems (DEPOX Series)

Model	Exhaust system		Ultimate Pressure	Features
Model	Main pump	Backing pump	Pa	Features
VFR-200M/X	Oil diffusion pump (200L/sec)	Oil rotary pump (100L/min)	10^-4 order	Small-sized high-vacuum low cost exhaust equipment that must be stored compactly, such as main pumps, backing pumps, valve piping, electrical systems and pressure measurement ports in stands. Four different types of exhaust system components are provided in the DEPOX series. Ideal for experiments requiring easy handling.
VWR-400M/X	Oil diffusion pump (400L/sec)	Oil rotary pump (200L/min)	10^-4 order
VTR-350M/X	Turbo molecular pump (345L/sec)	Oil rotary pump (200L/min)	10^-4 order
VTS-350M/X	Turbo molecular pump (345L/sec)	Scroll pump (250L/min)	10^-4 order

4. Vacuum Coater (VPC Series)

Model	Exhaust system		Ultimate Pressure	Features
Model	Main pump	Backing pump	Pa	Features
VPC-260F	Oil diffusion pump (200L/sec)	Oil rotary pump (100L/min)	1.3×10^-3	<VPC-260> Small-sized high-vacuum low cost exhaust equipment with resistance heating requiring compact storage, such as main pumps, backing pumps, valve piping, electrical systems and pressure measurement ports in pipe frames. Ideal for experiments, such as basic research and development of small boards. <VPC-1100> High-speed vacuum evaporation equipment with resistance heating equipped with a bell jar elevating device requiring compact storage, such as oil diffusion pumps, oil rotary vacuum pumps, Pirani vacuum gauges, valve piping, electrical systems and pressure measurement ports in stands. Ideal for experiments, such as basic research and development of large boards.
VPC-1100	Oil diffusion pump (1100L/sec)	Oil rotary pump (200L/min×2)	4.0×10^-4

5. Vacuum Coater (DEPOX Series)

Model	Exhaust system		Ultimate Pressure	Features
Model	Main pump	Backing pump	Pa	Features
VFR-200M/ERH	Oil diffusion pump (200L/sec)	Oil rotary pump (100L/min)	8.0×10^-4	Small-sized vacuum evaporation equipment with resistance heating requiring compact storage, such as main pumps, backing pumps, Pirani vacuum gauges, ionization vacuum gauges, valve piping, and electrical systems in stands. Four different types of exhaust system components are provided in the DEPOX series. Ideal for experiments, such as basic research and development requiring easy handling.
VWR-400M/ERH	Oil diffusion pump (400L/sec)	Oil rotary pump (200L/min)	4.0×10^-4
VTR-350M/ERH	Turbo molecular pump (345L/sec)	Oil rotary pump (200L/min)	4.0×10^-4
VTS-350M/ERH	Turbo molecular pump (345L/sec)	Scroll pump (250L/min)	4.0×10^-4

6. Sputtering Systems (RFS/SCOTT Series)

Model	Exhaust system		Ultimate Pressure	Features
Model	Main pump	Backing pump	Pa	Features
RFS-200	Oil diffusion pump (150L/sec)	Oil rotary pump (100L/min)	6.6×10^-4	Small-sized high-frequency sputtering device with an RF power supply. Ideal for basic research and development experiments because of the deposition capabilities for metal, semiconductors and insulators.
VTR-150M/SRF	Turbo molecular pump (230L/sec)	Oil rotary pump (200L/min)	6.6×10^-4