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| 1. High Vacuum Pumping Systems : VPC Series |
| VPC-050 |
Oil diffusion pump 50L/sec,Oil sealed
rotary pump 20L/min.
Ultimate pressure 7.0x10-4Pa(1.5x10-4Pa,with liquid nitrogen
trap) |
| VPC-250F |
Oil diffusion pumps 200L/sec, Oil
sealed rotary pump 100L/min.
Ultimate pressure 10-4Pa order (10-5 Pa order with liquid nitrogen
trap) |
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2. High Vacuum Pumping Systems : DEPOX Series
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| VFR-200M/X |
Oil diffusion pump 200L/sec,Oil sealed
rotary pump 100L/min.
Ultimate pressure 10-4Pa order (10-5 Pa order with liquid nitrogen
trap) |
| VWR-400M/X |
Oil diffusion pumps 400L/sec, Oil
sealed rotary pump 200L/min.
Ultimate pressure 10-4Pa order (10-5 Pa order with liquid nitrogen
trap) |
| VTR-350M/X |
Turbo molecular pump 345L/sec,Oil sealed
rotary pump 200L/min.
Ultimate pressure 10-4Pa order (10-5 Pa order with liquid nitrogen
trap) |
| VTS-350M/X |
Turbo molecular pump 345L/sec,Oil sealed
rotary pump 250L/min.
Ultimate pressure 10-4Pa order (10-5 Pa order with liquid nitrogen
trap) |
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| VPC-260F |
Bell-jar size 300mm,diameter,300mm.height
Ultimate presser 6.6x10-4 Pa, with liquid nitrogen trap |
| VPC-1100 |
Bell-jar size 390mm.diameter 350mm
height,
Ultimate pressure, below 1.3x10-4Pa with liquid nitrogen trap |
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| RSF-200 |
Compact radio frequency sputtering
system
Target size 80mm diameter x 1, |
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