Diaphragm Dry Vacuum Pumps

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Dry Vacuum Pumps

Diaphragm Dry Vacuum Pumps | Diaphragm Dry Vacuum Pumps (High Vacuum )
Diaphragm Dry Vacuum Pumps (Anti-Corrosive type )
Roking PistonType Dry Vacuum Pumps | Scroll Type Dry Vacuum Pumps

1. Diaphragm Dry Vacuum Pumps

Model	Pumping Speed		Ultimate Pressure			Features
Model	50Hz	60Hz	Pa	torr	mbar	Features
DAP-6D	6	7	6.65X10³	50	66.5	* Oil free clean pumping * Easy to maintain * Wide variety of size available
DAP-12S	12	14	24.0X10³	180	240
DA-20D	20	24	5.3X10³	40	53
DA-40S	40	46	19.9X10³	150	199
DA-30D	30	36	6.7X10³	50	67
DA-60S	60	72	21.3X10³	160	213
DA-41D	40	46	3.3X10³	25	33
DA-41DK	40	46	3.3X10³	25	33
DA-81S	75	85	13.3X10³	100	133
DA-81SK	75	85	13.3X10³	100	133
DA-60D	60	72	3.32X10³	25	33.2
DA-120S	120	144	13.3X10³	100	133
DA-121D	120	145	3.3X10³	25	33
DA-241S	240	260	16.0X10³	120	160
DAT-50D	50	55	3.3X10³	25	33
DAT-100S	100	110	13.3X10³	100	133

Applications

• Wafer handling system
• Vacuum handling system
• Tip mounter, Handler, Prober
• Vacuum chucks
• Automatic packing machines, printing equipments
• Labeling machines
• Vacuum drying system
• Scientific analysis equipments
• Vacuum tweezers, medical appliances
• Leak tester

2. Diaphragm Dry Vacuum Pumps (High Vacuum type )

Model	Pumping Speed		Ultimate Pressure			Features
Model	50Hz	60Hz	Pa	torr	mbar	Features
DAU-20	20	23	200	1.5	2	* High vacuum attainable. * PTFE used on all contacted parts of the gas (DTU-20). * High corrosion resistant (DTU-20).
DTU-20	20	23	200	1.5	2

Applications

• Backing pumps for wide-range T.M.P.
• Dry pumping system

3. Diaphragm Dry Vacuum Pumps (Anti-Corrosive type )

Model	Pumping Speed		Ultimate Pressure			Features
Model	50Hz	60Hz	Pa	torr	mbar	Features
DTC-21	20	24	1.0X10³	7.5	10	* PTFE used on all contacted parts of the gas. * Ultimate pressure down to 1kPa attainable. * Anti-corrosive type. * Built-in type is available.
DTC-41	40	46	1.0X10³	7.5	10
DTC-60	60	70	1.0X10³	7.5	10

Applications

• Rotary evaporator
• Evaporating system
• Vacuum Concentrator
• Vacuum filtration
• Exhaust of gas-transfer tube
• Vacuum drying systems
• Laser-gas circulation

4. Roking Piston type Dry Vacuum Pumps

Model	Pumping Speed		Ultimate Pressure			Features
Model	50Hz	60Hz	Pa	torr	mbar	Features
DOP-40D	40	44	1.2X 10³	9.0	120	* Usable in pressure zones close to atmospheric pressure. * Easy to maintain. * Less consumable parts and long operational life.
DOP-80S	80	88	5.4X10³	41	54
DOP-300SA	300	330	8.0X10³	60	80

Applications

5. Scroll type Dry Vacuum Pumps

Model	Pumping Speed		Ultimate Pressure			Features
Model	50Hz	60Hz	Pa	torr	mbar	Features
DIS-090	90	108	5.0	3.7X10^-2	5.0X10^-2	* Oil Free / Low ultimate pressure * No oil maintenance * Less energy
DIS-251	250	300	1.6	1.2X10^-2	1.6X10^-2
DIS-501	500	600	1.0	7.5X10^-3	1.0X10^-2
DISL-100	100	120	50.0	3.6X10^-1	5.0X10^-1
DISL-500	450	520	10.0	7.5X10^-2	1.0X10^-1

Applications

• Load-lock exhaust
• Backing pumps for T.M.P. or cryo pumps
• Vacuum Dryer