|
Double wrap
/ terminal only (without cord)
with switch / with thermal protector / with air flash
|
 |
• |
Double wrap type scroll pump which consists of 1 orbiting and 2 fixed scrolls. |
• |
Operation from atmospheric pressure is possible. |
• |
High ultimate pressure level is attainable. |
• |
Low vibration and noise. |
• |
Maintenance cycle can be controlled by hour meter. |
• |
Analytical equipment. |
• |
Gas recovery system. |
• |
Coating equipment. |
• |
Back pump for TMP. |
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Helium leak detector. |
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Manufacturing process for semiconductor. |
|
|
| |
Unit |
50Hz |
60Hz |
| Nominal pumping speed |
L/min |
90 |
108 |
| Ultimate pressure |
Pa |
5.0 |
| Motor |
|
Single
phase, 100/115/200/230V,
150W, 4P, Capacitor start & run |
| Full load current |
A |
2.6/1.3/1.6
(100/200/230V) |
2.1/2.2/1.1/1.1
(100/115/200/230V) |
| Weight |
kg |
14.0 |
| Inlet, outlet pipe diameter |
|
Inlet
pipe KF25 Outlet pipe KF16 |
| Ambient temperature |
°C |
5 – 40 |
| Water vapor handling |
g/day |
≤5 (A.F. open) |
| Overall dimensions |
mm |
214(W)
× 308(L) × 225(H) |
|
| 1. |
If the pump evacuates the powder or the product, it might be damaged.
Please use the inlet filter etc. |
| 2. |
Do not evacuate gas which is hazardous to humans or explosive, flammable, or corrosive.
If done, it can cause failure by gas, explosion or ignite. |
| Voltage |
Applicable
Volt |
CE Marked |
CSA Marked |
Single phase,
100V / 115V (60Hz)/ 200-230V |
Standard |
 |
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ULVAC KIKO, Inc. |
Overseas Division |
TEL (81) 45-533-0206 |
FAX (81) 45-533-0204 |
Please contact us by E-mail → here |
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