Language HOME Company Infomation Products Infomation Global Sales Network Global Service Network Enviromental pollcy Contact Privacy policy ULVAC Group Guidance Site Map




Oil Clean System

Oil Clean System OFC-200XA

A set of an anti-corrosive oil rotary
vacuum pump and an oil filtration system.

· Outline

A pump unit of anti-corrosive oil rotary vacuum pump GCD series and an oil filtration system UFO-012 with rack. The wheels make it easy to move around.

· Features
· Compact
· Low noise and low vibration
· Easy maintenance
· Reasonable in price

· Applications
· Semiconductors production devices
· CVD systems
· Vacuum drying / Freeze drying
· Chemical / Pharmaceutical / Medical units

Specifications

Models OFC-135XA OFC-200XA
Ultimate pressure 6.7 x 10-2Pa
Pumping speed 135/162L/min
(50/60Hz)
200/240L/min
(50/60Hz)
Water absorbing capacity 1200cc / element
Acid neutralizing capacity 1.5mol / element
Filtration capacity 0.1 µm
Required power Single phase, 1.0kW
(50/60Hz)
Single phase, 100V 1.2kW
(50/60Hz)
Weight 54kg 52kg
Outside dimensions
(W) x (L) x (H)
280mm x 602mm x 686mm 280mm x 630mm x 686mm
Optional parts Anti-corrosive Type Oil-mist Separator (OMC-200)



Copyright (C)2003 ULVAC KIKO, Inc. All Right Reserved. Ver.3.00 (November 2006)